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Probe methods for diagnostics of plasmatic systems for deposition of thin films
Zanáška, Michal ; Tichý, Milan (advisor) ; Dvořák, Pavel (referee) ; Straňák, Vítězslav (referee)
The doctoral thesis deals with an experimental study of several diagnostic techniques intended for plasma diagnostics and diagnostics of thin films during reactive sputter deposition. A relatively novel probe diagnostic technique called Floating harmonic probe for measurement of the ion density and electron tem- perature in technological low-temperature plasma is studied. A Langmuir probe is commonly used, however, its application in conditions where non-conducting films are being deposited can be problematic or unreliable. The floating harmonic probe measurement technique deals with this inherent problem of the Langmuir probe. The Floating harmonic probe results are compared to those obtained by a classical Langmuir probe in non-reactive DC continuously driven discharge, and its applicability in reactive regime during deposition of iron oxide thin films is proved. The work deals also with a modification of the Floating harmonic probe called Phase Delay Harmonic Analysis Method which is intended for diagnostics of pulsed driven discharges. The second part of the thesis is devoted to a new proposed method for in-situ diagnostics of thin films. This method monitors the capacitance and resistance of a thin film during deposition up to the frequencies in the kHz range. This new method could be used for...
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Probe methods for diagnostics of plasmatic systems for deposition of thin films
Zanáška, Michal ; Tichý, Milan (advisor) ; Dvořák, Pavel (referee) ; Straňák, Vítězslav (referee)
The doctoral thesis deals with an experimental study of several diagnostic techniques intended for plasma diagnostics and diagnostics of thin films during reactive sputter deposition. A relatively novel probe diagnostic technique called Floating harmonic probe for measurement of the ion density and electron tem- perature in technological low-temperature plasma is studied. A Langmuir probe is commonly used, however, its application in conditions where non-conducting films are being deposited can be problematic or unreliable. The floating harmonic probe measurement technique deals with this inherent problem of the Langmuir probe. The Floating harmonic probe results are compared to those obtained by a classical Langmuir probe in non-reactive DC continuously driven discharge, and its applicability in reactive regime during deposition of iron oxide thin films is proved. The work deals also with a modification of the Floating harmonic probe called Phase Delay Harmonic Analysis Method which is intended for diagnostics of pulsed driven discharges. The second part of the thesis is devoted to a new proposed method for in-situ diagnostics of thin films. This method monitors the capacitance and resistance of a thin film during deposition up to the frequencies in the kHz range. This new method could be used for...
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Elektrické výboje pro využití při čištění vody
Lukeš, Petr ; Člupek, Martin ; Babický, Václav ; Tothová, I. ; Vykouk, T. ; Říhová -Ambrožová, J. ; Janda, V.
Non-equilibrium plasma generated by electrical discharges in liquids initiate various chemical and physical processes that can be potentially utilized in different environmental, biological or medical applications. Depending on the type of the discharge and the input energy these processes include high electric field, ultraviolet radiation, overpressure shock waves and, of particular importance, formation of various reactive chemical species. It has been demonstrated that these physical and chemical processes are capable to inactivate or degrade various microorganisms and chemical compounds dissolved in water. In this presentation an overview of basic principles of electrical discharges in water will be given with particular emhasis to the pulsed (electrohydraulic) discharges, the physical and chemical effects initiated by these discharges in water and their utilization for water treatment applications.
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